Lumencor’s solid-state illumination products facilitate accurate measurements at production speed for wafer defect inspection using bright and dark field microscopy and other industrial metrology techniques.
Consistency and reliability are critical attributes of illumination used to support advanced materials metrology. Lumencor’s precision manufacturing yields unsurpassed intra- and inter- Light Engine reproducibility. Light Engines integrate arrays of LEDs, light pipes, and lasers deploying control software and dedicated microprocessors with sophisticated feedback. Building on modular designs that offer robust integration, optimization of optical power, brightness, spectral range and angular distribution can be engineered to match the diverse requirements of a host of diverse industrial metrology applications.
Advanced Illumination: Lumencor's solid-state lighting offers state-of-the-art precision in wavelength, brightness and optics design. This means fast wafer defect inspection across a broad range of light microscopy and metrology techniques.
Mission-Critical Reliability: Consistent performance and reliability are paramount in industrial metrology, where 24/7 utility demands need rugged illumination support.
Unsurpassed Reproducibility: Lumencor ensures unparalleled reproducibility in the form of intra- and inter- Light Engine consistency.
Modular Flexibility: Lumencor Light Engines feature well-integrated arrays of LEDs, light pipes, and lasers, in both off-the-shelf and OEM custom applications.
Tailored Performance: Performance characteristics such as optical power, brightness, spectral range, and angular distribution can be configured to meet the diverse requirements of industrial metrology applications.