Skip Navigation

Materials Sciences


Lumencor’s solid state illumination products facilitate accurate measurements at production speed for wafer defect inspection using bright and dark field microscopy and other industrial metrology applications. Consistent performance and reliability are mission critical in these applications. Accordingly, Lumencor’s precision manufacturing processes result in unsurpassed performance reproducibility from one microscope light engine to the next. Our light engines provide arrays of LEDs, light pipes, and lasers integrated through control software deployed on dedicated microprocessors. Building on this modular and flexible platform, performance characteristics such as optical power, brightness, spectral range and angular distribution can be readily configured to match the diverse requirements of industrial metrology applications.